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Conformality in atomic layer deposition: Current status …

4/4/2019 · Professor Christophe Detavernier, Ghent University, and Dr. Markku Ylilammi, VTT, are thanked for the many helpful discussions. V.C. acknowledges financial support from the Strategic Initiative Materials in Flanders (SIM, SBO-FUNC project). R.L.P. acknowledges

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Conformality in atomic layer deposition: Current status …

4/4/2019 · Atomic layer deposition (ALD) is a gas phase thin film deposition technique which has been discovered and developed independently in the 1960s in the Soviet Union and in 1974 in Finland. 1–3 1. E. Ahvenniemi, A. R. Akbashev, S. Ali, M. Bechelany, M. Berdova

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