1/5/2016 · 3.3. Pyrolytic gas Gases released from biomass pyrolysis may consist of carbon dioxide (CO 2), carbon monoxide (CO), hydrogen (H 2), low carbon number hydrocarbons such as methane (CH 4), ethane (C 2 H 6), and ethylene (C 2 H 4), and small amounts of other gases, such as propane (C 3 H 8), ammonia (NH 3), nitrogen oxides (NO x), sulphur oxides (SO x) and alcohols of low carbon numbers.
30/11/2016 · 1. Introduction High-permittivity (high-k) dielectrics have been explored as an alternative gate insulator to conventional SiO 2 in metal-oxide-semiconductor-field-effect-transistor (MOSFET) technology,, .Among various high-k deposition techniques, atomic layer deposition (ALD) is favored due to its excellent process controllability for extremely thin high-k films .
4/4/2019 · Professor Christophe Detavernier, Ghent University, and Dr. Markku Ylilammi, VTT, are thanked for the many helpful discussions. V.C. acknowledges financial support from the Strategic Initiative Materials in Flanders (SIM, SBO-FUNC project). R.L.P. acknowledges
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4/4/2019 · Atomic layer deposition (ALD) is a gas phase thin film deposition technique which has been discovered and developed independently in the 1960s in the Soviet Union and in 1974 in Finland. 1–3 1. E. Ahvenniemi, A. R. Akbashev, S. Ali, M. Bechelany, M. Berdova
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